Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811005 | Lithographic apparatus and device manufacturing method | Yang-Shan Huang | 2017-11-07 |
| 9726985 | Stage system and a lithographic apparatus | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Johannes Petrus Martinus Bernardus Vermeulen, Robertus Mathijs Gerardus Rijs, Richard Henricus Adrianus Van Lieshout | 2017-08-08 |
| 9696640 | Lithographic apparatus | Adrianus Hendrik Koevoets, Harmeet Singh | 2017-07-04 |
| 9684249 | Lithographic apparatus with a metrology system for measuring a position of a substrate table | Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders | 2017-06-20 |
| 9618859 | Lithographic apparatus and device manufacturing method | Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Jan Bernard Plechelmus Van Schoot, Koen Jacobus Johannes Maria Zaal | 2017-04-11 |