Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9785060 | Stage system and lithographic apparatus comprising such stage system | Rob Johan Theodoor Rutten, Jan Steven Christiaan Westerlaken, Koen Jacobus Johannes Maria Zaal, Richard Henricus Adrianus Van Lieshout, Engelbertus Antonius Fransiscus Van Der Pasch | 2017-10-10 |
| 9575416 | Lithographic apparatus, device manufacturing method and displacement measurement system | Engelbertus Antonius Fransiscus Van Der Pasch, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Fransiscus Mathijs Jacobs, Willem Herman Gertruda Anna Koenen +1 more | 2017-02-21 |