Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9651877 | Position measurement system, grating for a position measurement system and method | — | 2017-05-16 |
| 9575416 | Lithographic apparatus, device manufacturing method and displacement measurement system | Engelbertus Antonius Fransiscus Van Der Pasch, Ruud Antonius Catharina Maria Beerens, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Fransiscus Mathijs Jacobs +1 more | 2017-02-21 |