Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804509 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Sjoerd Nicolaas Lambertus Donders, Hans Jansen | 2017-10-31 |
| 9773578 | Radiation source-collector and method for manufacture | Alexey Sergeevich Kuznetsov, Jeroen Huijbregtse, Andrey Nikipelov, Maarten Van Kampen | 2017-09-26 |
| 9594308 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Sjoerd Nicolaas Lambertus Donders, Hans Jansen | 2017-03-14 |