Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773578 | Radiation source-collector and method for manufacture | Alexey Sergeevich Kuznetsov, Arjen Boogaard, Jeroen Huijbregtse, Andrey Nikipelov | 2017-09-26 |
| 9606445 | Lithographic apparatus and method of manufacturing a device | Vadim Yevgenyevich Banine, Arthur Winfried Eduardus Minnaert, Marcel Johannus Elisabeth Hubertus Muitjens, Andrei Mikhailovich Yakunin, Luigi Scaccabarozzi +8 more | 2017-03-28 |