Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9740106 | Substrate placement in immersion lithography | Christiaan Alexander Hoogendam, Minne Cuperus, Petrus Anton Willem Cornelia Maria Van Eijck | 2017-08-22 |
| 9551939 | Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Stanley Drazkiewicz, Justin Kreuzer | 2017-01-24 |