Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9605947 | Position measurement with illumination profile having regions confined to peripheral portion of pupil | Arie Jeffrey Den Boef, Simon Josephus Mathijssen | 2017-03-28 |
| 9551939 | Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Stanley Drazkiewicz, Gerrit Johannes Nijmeijer | 2017-01-24 |