Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835954 | Inspection method and apparatus, substrates for use therein and device manufacturing method | Erik Willem Bogaart, Franciscus Godefridus Casper Bijnen, Arie Jeffrey Den Boef | 2017-12-05 |
| 9778025 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Erik Willem Bogaart, Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef | 2017-10-03 |
| 9733572 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | — | 2017-08-15 |
| 9632039 | Inspection apparatus, inspection method and manufacturing method | Arie Jeffrey Den Boef, Nitesh Pandey, Stefan Michiel Witte, Kjeld Sijbrand Eduard Eikema | 2017-04-25 |
| 9606442 | Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef | 2017-03-28 |
| 9551939 | Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Stanley Drazkiewicz, Justin Kreuzer, Gerrit Johannes Nijmeijer | 2017-01-24 |
| 9547241 | Alignment sensor, lithographic apparatus and alignment method | Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans | 2017-01-17 |