Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835954 | Inspection method and apparatus, substrates for use therein and device manufacturing method | Erik Willem Bogaart, Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen | 2017-12-05 |
| 9726991 | Patterning device, method of producing a marker on a substrate and device manufacturing method | Johannes Jacobus Matheus Baselmans, Daniëlle Elisabeth Maria Palmen | 2017-08-08 |