Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835954 | Inspection method and apparatus, substrates for use therein and device manufacturing method | Franciscus Godefridus Casper Bijnen, Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen | 2017-12-05 |
| 9778025 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | Simon Gijsbert Josephus Mathijssen, Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef | 2017-10-03 |
| 9696638 | Lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent +2 more | 2017-07-04 |