Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823576 | Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method | Dries Smeets, Arno Jan Bleeker, Christopher J. Lee, Pieter Willem Herman De Jager, Rudy Jan Maria Pellens | 2017-11-21 |
| 9778575 | Lithographic apparatus and method | Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek, Paul Van Der Veen +2 more | 2017-10-03 |
| 9715183 | Device, lithographic apparatus, method for guiding radiation and device manufacturing method | Wouter Dick KOEK, Arno Jan Bleeker, Erik Roelof Loopstra, Erwin John Van Zwet, Dries Smeets +1 more | 2017-07-25 |
| 9651875 | Illumination system and lithographic apparatus | Steven George Hansen, Johannes Catharinus Hubertus Mulkens, Markus Deguenther | 2017-05-16 |
| 9563135 | Process tuning with polarization | Steven George Hansen, Tsann-Bim Chiou | 2017-02-07 |