Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9651875 | Illumination system and lithographic apparatus | Heine Melle Mulder, Johannes Catharinus Hubertus Mulkens, Markus Deguenther | 2017-05-16 |
| 9563135 | Process tuning with polarization | Heine Melle Mulder, Tsann-Bim Chiou | 2017-02-07 |