Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823572 | Lithographic method | Andrey Nikipelov, Olav Waldemar Vladimir Frijns, Gosse Charles De Vries, Erik Roelof Loopstra, Vadim Yevgenyevich Banine +8 more | 2017-11-21 |
| 9823576 | Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method | Dries Smeets, Arno Jan Bleeker, Christopher J. Lee, Heine Melle Mulder, Rudy Jan Maria Pellens | 2017-11-21 |
| 9728931 | Electron injector and free electron laser | Andrey Nikipelov, Vadim Yevgenyevich Banine, Gosse Charles De Vries, Olav Waldemar Vladimir Frijns, Leonardus Adrianus Gerardus Grimminck +7 more | 2017-08-08 |
| 9645502 | Lithographic apparatus, programmable patterning device and lithographic method | Vadim Yevgenyevich Banine, Johannes Onvlee, Lucas Henricus Johannes Stevens, Sander Frederik Wuister, Nikolay Nikolaevich Iosad | 2017-05-09 |