Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823576 | Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method | Dries Smeets, Arno Jan Bleeker, Christopher J. Lee, Pieter Willem Herman De Jager, Heine Melle Mulder | 2017-11-21 |