Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823576 | Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method | Dries Smeets, Christopher J. Lee, Pieter Willem Herman De Jager, Heine Melle Mulder, Rudy Jan Maria Pellens | 2017-11-21 |
| 9715183 | Device, lithographic apparatus, method for guiding radiation and device manufacturing method | Wouter Dick KOEK, Erik Roelof Loopstra, Heine Melle Mulder, Erwin John Van Zwet, Dries Smeets +1 more | 2017-07-25 |
| 9696636 | Lithographic apparatus, device manufacturing method and computer program | Patricius Aloysius Jacobus Tinnemans, Erik Roelof Loopstra | 2017-07-04 |
| 9690210 | Lithographic apparatus and device manufacturing method | Laurentius Cornelius De Winter | 2017-06-27 |
| 9594304 | Lithography apparatus, a device manufacturing method, a method of manufacturing an attenuator | Martinus Hendricus Hoeks | 2017-03-14 |
| 9568831 | Lithographic apparatus and device manufacturing method | Patricius Aloysius Jacobus Tinnemans | 2017-02-14 |