Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9715183 | Device, lithographic apparatus, method for guiding radiation and device manufacturing method | Wouter Dick KOEK, Arno Jan Bleeker, Erik Roelof Loopstra, Heine Melle Mulder, Dries Smeets +1 more | 2017-07-25 |