Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823572 | Lithographic method | Andrey Nikipelov, Olav Waldemar Vladimir Frijns, Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager +8 more | 2017-11-21 |
| 9785051 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Jan Bernard Plechelmus Van Schoot, Sven Antoin Johan Hol, Edwin Johan Buis, Erik Maria Rekkers, Hako Botma +2 more | 2017-10-10 |
| 9728931 | Electron injector and free electron laser | Andrey Nikipelov, Vadim Yevgenyevich Banine, Pieter Willem Herman De Jager, Olav Waldemar Vladimir Frijns, Leonardus Adrianus Gerardus Grimminck +7 more | 2017-08-08 |