Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9785051 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Jan Bernard Plechelmus Van Schoot, Sven Antoin Johan Hol, Erik Maria Rekkers, Gosse Charles De Vries, Hako Botma +2 more | 2017-10-10 |
| 9651772 | Arrangement for the actuation of at least one element in an optical system | Markus Hauf, Martin Latzel | 2017-05-16 |