Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846370 | Support apparatus for an optical device, optical device and lithography system | Henner Baitinger | 2017-12-19 |
| 9798254 | Arrangement for the thermal actuation of a mirror, in particular in a microlithographic projection exposure apparatus | — | 2017-10-24 |
| 9746778 | EUV exposure apparatus with reflective elements having reduced influence of temperature variation | Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more | 2017-08-29 |
| 9665011 | Arrangement for actuating at least one optical element in an optical system | Alexander Vogler | 2017-05-30 |
| 9651772 | Arrangement for the actuation of at least one element in an optical system | Martin Latzel, Edwin Johan Buis | 2017-05-16 |
| 9593733 | Damping arrangement for dissipating oscillating energy of an element in a system, more particularly in a microlithographic projection exposure apparatus | — | 2017-03-14 |
| 9581912 | Model-based control of an optical imaging device | Gerald Rothenhoefer | 2017-02-28 |