Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9785051 | Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices | Jan Bernard Plechelmus Van Schoot, Edwin Johan Buis, Erik Maria Rekkers, Gosse Charles De Vries, Hako Botma +2 more | 2017-10-10 |
| 9535340 | Support for a movable element and lithography apparatus | Fidelus Adrianus Boon, Olof Martinus Josephus Fischer | 2017-01-03 |