Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778575 | Lithographic apparatus and method | Heine Melle Mulder, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek +2 more | 2017-10-03 |
| 9645510 | Method of controlling a radiation source and lithographic apparatus comprising the radiation source | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Adrianus Leonardus Gertrudus Bommer, Robert De Jong, Frank Everts, Herman Philip Godfried +1 more | 2017-05-09 |