Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9762023 | Online calibration for repetition rate dependent performance variables | Joshua Jon Thornes, Tanuj Aggarwal, Kevin M. O'Brien, Herman Philip Godfried, Russell Allen Burdt | 2017-09-12 |
| 9645510 | Method of controlling a radiation source and lithographic apparatus comprising the radiation source | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Adrianus Leonardus Gertrudus Bommer, Robert De Jong, Herman Philip Godfried, Roland Pieter Stolk +1 more | 2017-05-09 |