Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9819136 | Gas mixture control in a gas discharge light source | Rahul Ahlawat | 2017-11-14 |
| 9762023 | Online calibration for repetition rate dependent performance variables | Joshua Jon Thornes, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried, Russell Allen Burdt | 2017-09-12 |
| 9634455 | Gas optimization in a gas discharge light source | — | 2017-04-25 |