Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831628 | System and method for automatic gas optimization in a two-chamber gas discharge laser system | Kevin M. O'Brien, Michael Anthony Borrello | 2017-11-28 |
| 9778108 | Metrology system and method having a plurality of sensors for estimating a spectral feature of a pulsed light beam | — | 2017-10-03 |
| 9762023 | Online calibration for repetition rate dependent performance variables | Tanuj Aggarwal, Kevin M. O'Brien, Frank Everts, Herman Philip Godfried, Russell Allen Burdt | 2017-09-12 |