Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831628 | System and method for automatic gas optimization in a two-chamber gas discharge laser system | Joshua Jon Thornes, Michael Anthony Borrello | 2017-11-28 |
| 9785050 | Pulsed light beam spectral feature control | Rahul Ahlawat | 2017-10-10 |
| 9772556 | Pulsed light beam spectral feature control | Rahul Ahlawat | 2017-09-26 |
| 9762023 | Online calibration for repetition rate dependent performance variables | Joshua Jon Thornes, Tanuj Aggarwal, Frank Everts, Herman Philip Godfried, Russell Allen Burdt | 2017-09-12 |