Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846132 | Small-angle scattering X-ray metrology systems and methods | Michael S. Bakeman, Ady Levy, Guorong V. Zhuang, John J. Hench | 2017-12-19 |
| 9826614 | Compac X-ray source for semiconductor metrology | Michael S. Bakeman | 2017-11-21 |
| 9816810 | Measurement of multiple patterning parameters | Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Noam Sapiens, Stilian Ivanov Pandev | 2017-11-14 |
| 9784690 | Apparatus, techniques, and target designs for measuring semiconductor parameters | Noam Sapiens, Stilian Ivanov Pandev | 2017-10-10 |
| 9778213 | Metrology tool with combined XRF and SAXS capabilities | Michael S. Bakeman, Kevin Peterlinz, Thaddeus Gerard Dziura | 2017-10-03 |
| 9719932 | Confined illumination for small spot size metrology | Derrick Shaughnessy, Michael S. Bakeman, Guorong V. Zhuang, Leonid Poslavsky | 2017-08-01 |
| 9693439 | High brightness liquid droplet X-ray source for semiconductor metrology | Guorong V. Zhuang, Michael S. Bakeman, Jonathan M. Madsen | 2017-06-27 |
| 9535018 | Combined x-ray and optical metrology | Kevin Peterlinz, Michael S. Bakeman, Thaddeus Gerard Dziura | 2017-01-03 |