Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846132 | Small-angle scattering X-ray metrology systems and methods | Michael S. Bakeman, Andrei V. Shchegrov, Guorong V. Zhuang, John J. Hench | 2017-12-19 |
| 9702693 | Apparatus for measuring overlay errors | Mark Ghinovker, Michael Adel, Walter D. Mieher, Dan Wack | 2017-07-11 |
| 9576861 | Method and system for universal target based inspection and metrology | Allen Park, Ellis Chang, Michael Adel, Kris Bhaskar, Amir Widmann +2 more | 2017-02-21 |