Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846132 | Small-angle scattering X-ray metrology systems and methods | Andrei V. Shchegrov, Ady Levy, Guorong V. Zhuang, John J. Hench | 2017-12-19 |
| 9826614 | Compac X-ray source for semiconductor metrology | Andrei V. Shchegrov | 2017-11-21 |
| 9778213 | Metrology tool with combined XRF and SAXS capabilities | Andrei V. Shchegrov, Kevin Peterlinz, Thaddeus Gerard Dziura | 2017-10-03 |
| 9719932 | Confined illumination for small spot size metrology | Derrick Shaughnessy, Guorong V. Zhuang, Andrei V. Shchegrov, Leonid Poslavsky | 2017-08-01 |
| 9693439 | High brightness liquid droplet X-ray source for semiconductor metrology | Guorong V. Zhuang, Andrei V. Shchegrov, Jonathan M. Madsen | 2017-06-27 |
| 9535018 | Combined x-ray and optical metrology | Kevin Peterlinz, Andrei V. Shchegrov, Thaddeus Gerard Dziura | 2017-01-03 |