Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9693439 | High brightness liquid droplet X-ray source for semiconductor metrology | Guorong V. Zhuang, Michael S. Bakeman, Andrei V. Shchegrov | 2017-06-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9693439 | High brightness liquid droplet X-ray source for semiconductor metrology | Guorong V. Zhuang, Michael S. Bakeman, Andrei V. Shchegrov | 2017-06-27 |