Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846132 | Small-angle scattering X-ray metrology systems and methods | Michael S. Bakeman, Andrei V. Shchegrov, Ady Levy, John J. Hench | 2017-12-19 |
| 9719932 | Confined illumination for small spot size metrology | Derrick Shaughnessy, Michael S. Bakeman, Andrei V. Shchegrov, Leonid Poslavsky | 2017-08-01 |
| 9693439 | High brightness liquid droplet X-ray source for semiconductor metrology | Michael S. Bakeman, Andrei V. Shchegrov, Jonathan M. Madsen | 2017-06-27 |