Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9719932 | Confined illumination for small spot size metrology | Derrick Shaughnessy, Michael S. Bakeman, Guorong V. Zhuang, Andrei V. Shchegrov | 2017-08-01 |
| 9664734 | Multi-oscillator, continuous Cody-Lorentz model of optical dispersion | Natalia Malkova | 2017-05-30 |
| 9625823 | Calculation method for local film stress measurements using local film thickness values | Torsten R. Kaack, Yu Tay | 2017-04-18 |
| 9607265 | Accurate and fast neural network training for library-based critical dimension (CD) metrology | Wen Jin, Vi Vuong, Junwei Bao, Lie-Quan Lee | 2017-03-28 |
| 9595481 | Dispersion model for band gap tracking | Natalia Malkova, Ming Di, Qiang Zhao, Dawei Hu | 2017-03-14 |
| 9559019 | Metrology through use of feed forward feed sideways and measurement cell re-use | Michael Adel, John Fielden, John Ernst Nielsen Madsen, Robert W. Peters | 2017-01-31 |
| 9553033 | Semiconductor device models including re-usable sub-structures | Jonathan Iloreta, Matthew A. Laffin, Torsten R. Kaack, Qiang Zhao, Lie-Quan Lee | 2017-01-24 |