Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9625823 | Calculation method for local film stress measurements using local film thickness values | Torsten R. Kaack, Leonid Poslavsky | 2017-04-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9625823 | Calculation method for local film stress measurements using local film thickness values | Torsten R. Kaack, Leonid Poslavsky | 2017-04-18 |