Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846088 | Differential acoustic time of flight measurement of temperature of semiconductor substrates | Jun Pei, Holger Tuitje, Ching-Ling Meng, Mihail Mihaylov | 2017-12-19 |
| 9607265 | Accurate and fast neural network training for library-based critical dimension (CD) metrology | Wen Jin, Vi Vuong, Lie-Quan Lee, Leonid Poslavsky | 2017-03-28 |