Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846088 | Differential acoustic time of flight measurement of temperature of semiconductor substrates | Junwei Bao, Holger Tuitje, Ching-Ling Meng, Mihail Mihaylov | 2017-12-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846088 | Differential acoustic time of flight measurement of temperature of semiconductor substrates | Junwei Bao, Holger Tuitje, Ching-Ling Meng, Mihail Mihaylov | 2017-12-19 |