| 9818621 |
Cyclic oxide spacer etch process |
Aurelien Tavernier, Qingjun Zhou, Tom Choi, YungChen Lin, Olivier Joubert |
2017-11-14 |
| 9812341 |
Rare-earth oxide based coatings based on ion assisted deposition |
Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor |
2017-11-07 |
| 9799491 |
Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching |
Leonid Dorf, Kenneth S. Collins, Shahid Rauf, Kartik Ramaswamy, James D. Carducci +2 more |
2017-10-24 |
| 9797037 |
Ion beam sputtering with ion assisted deposition for coatings on chamber components |
Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman |
2017-10-24 |
| 9728623 |
Replacement metal gate transistor |
Steven R. Sherman |
2017-08-08 |
| 9725799 |
Ion beam sputtering with ion assisted deposition for coatings on chamber components |
Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman |
2017-08-08 |
| 9721807 |
Cyclic spacer etching process with improved profile control |
Qingjun Zhou, Jungmin Ko, Tom Choi, Sean S. Kang, Jeremiah T. Pender +1 more |
2017-08-01 |
| 9711334 |
Ion assisted deposition for rare-earth oxide based thin film coatings on process rings |
Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor |
2017-07-18 |
| 9708713 |
Aerosol deposition coating for semiconductor chamber components |
Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho |
2017-07-18 |
| 9660054 |
Tunneling field effect transistor (TFET) with ultra shallow pockets formed by asymmetric ion implantation and method of making same |
— |
2017-05-23 |
| 9643179 |
Techniques for fabricating horizontally aligned nanochannels for microfluidics and biosensors |
Sebastian U. Engelmann, Stephen M. Rossnagel |
2017-05-09 |
| 9583369 |
Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles |
Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor |
2017-02-28 |
| 9564297 |
Electron beam plasma source with remote radical source |
Ming-Feng Wu, Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Hamid Tavassoli +2 more |
2017-02-07 |
| 9553147 |
Trench formation with CD less than 10nm for replacement fin growth |
Hua Chung |
2017-01-24 |
| 9548201 |
Self-aligned multiple spacer patterning schemes for advanced nanometer technology |
Uday Mitra, Praburam Gopalraja, Srinivas D. Nemani, Hua Chung |
2017-01-17 |
