Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850568 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2017-12-26 |
| 9797037 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang | 2017-10-24 |
| 9761416 | Apparatus and methods for reducing particles in semiconductor process chambers | Andrew Nguyen, Bradley J. Howard, Shahid Rauf, Ajit Balakrishna, Kenneth S. Collins +3 more | 2017-09-12 |
| 9725799 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Vedapuram S. Achutharaman, Ying Zhang | 2017-08-08 |
| 9714465 | Gas distribution blocker apparatus | Lun Tsuei, Alan Tso, Brian Sy-Yuan Shieh | 2017-07-25 |
| 9708713 | Aerosol deposition coating for semiconductor chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2017-07-18 |