Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850568 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho | 2017-12-26 |
| 9812341 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2017-11-07 |
| 9797037 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2017-10-24 |
| 9725799 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2017-08-08 |
| 9711334 | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2017-07-18 |
| 9687953 | Chamber components with polished internal apertures | Jennifer Y. Sun, David Koonce, Biraja P. Kanungo | 2017-06-27 |
| 9663870 | High purity metallic top coat for semiconductor manufacturing components | Jennifer Y. Sun | 2017-05-30 |
| 9583369 | Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles | Jennifer Y. Sun, Biraja P. Kanungo, Ying Zhang | 2017-02-28 |