Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9797037 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Ying Zhang | 2017-10-24 |
| D797691 | Composite edge ring | Olivier Joubert, Jason A. Kenney, Sunil Srinivasan, James Rogers, Rajinder Dhindsa +1 more | 2017-09-19 |
| 9725799 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Ying Zhang | 2017-08-08 |