Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793126 | Ion to neutral control for wafer processing with dual plasma source reactor | Sang Ki Nam, Alexei Marakhtanov, Eric A. Hudson | 2017-10-17 |
| 9793128 | Plasma processing chamber with dual axial gas injection and exhaust | Alexei Marakhtanov, Andrew D. Bailey, III | 2017-10-17 |
| 9779916 | Radio frequency (RF) ground return arrangements | Akira Koshishi, Alexei Maraktanov | 2017-10-03 |
| D797691 | Composite edge ring | Olivier Joubert, Jason A. Kenney, Sunil Srinivasan, James Rogers, Vedapuram S. Achutharaman +1 more | 2017-09-19 |
| 9536711 | Method and apparatus for DC voltage control on RF-powered electrode | Eric A. Hudson, Alexei Marakhtanov, Maryam Moravej, Andreas Fischer | 2017-01-03 |