Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D797691 | Composite edge ring | Olivier Joubert, Sunil Srinivasan, James Rogers, Rajinder Dhindsa, Vedapuram S. Achutharaman +1 more | 2017-09-19 |
| 9745663 | Symmetrical inductively coupled plasma source with symmetrical flow chamber | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more | 2017-08-29 |