Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829790 | Immersion field guided exposure and post-exposure bake process | Douglas A. Buchberger, Jr., Viachslav Babayan, Christine Y Ouyang, Ludovic Godet, Srinivas D. Nemani | 2017-11-28 |
| 9823570 | Field guided post exposure bake application for photoresist microbridge defects | Ludovic Godet, Christine Y Ouyang | 2017-11-21 |
| 9793126 | Ion to neutral control for wafer processing with dual plasma source reactor | Rajinder Dhindsa, Alexei Marakhtanov, Eric A. Hudson | 2017-10-17 |
| 9733579 | Tooling configuration for electric/magnetic field guided acid profile control in a photoresist layer | Peng Xie, Qiwei Liang, Ludovic Godet | 2017-08-15 |