Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829790 | Immersion field guided exposure and post-exposure bake process | Douglas A. Buchberger, Jr., Sang Ki Nam, Christine Y Ouyang, Ludovic Godet, Srinivas D. Nemani | 2017-11-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829790 | Immersion field guided exposure and post-exposure bake process | Douglas A. Buchberger, Jr., Sang Ki Nam, Christine Y Ouyang, Ludovic Godet, Srinivas D. Nemani | 2017-11-28 |