Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829790 | Immersion field guided exposure and post-exposure bake process | Douglas A. Buchberger, Jr., Sang Ki Nam, Viachslav Babayan, Ludovic Godet, Srinivas D. Nemani | 2017-11-28 |
| 9823570 | Field guided post exposure bake application for photoresist microbridge defects | Ludovic Godet, Sang Ki Nam | 2017-11-21 |