Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829790 | Immersion field guided exposure and post-exposure bake process | Sang Ki Nam, Viachslav Babayan, Christine Y Ouyang, Ludovic Godet, Srinivas D. Nemani | 2017-11-28 |
| 9745663 | Symmetrical inductively coupled plasma source with symmetrical flow chamber | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci +5 more | 2017-08-29 |
| 9741546 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen +3 more | 2017-08-22 |
| 9666466 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Jason C. Della Rosa, Hamid Noorbakhsh, Brad L. Mays | 2017-05-30 |
| 9570275 | Heated showerhead assembly | James D. Carducci, Olga Regelman, Kallol Bera, Paul Brillhart | 2017-02-14 |