Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666466 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Jason C. Della Rosa, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2017-05-30 |
| 9622375 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Masanori Ono | 2017-04-11 |
| 9558981 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Masanori Ono, Senh Thach | 2017-01-31 |