Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666466 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2017-05-30 |
| 9610591 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Zheng John Ye, Jennifer Y. Sun +1 more | 2017-04-04 |