Senh Thach — 2 Patents at Applied Materials

Issued Patents 2017

Showing 1–2 of 2 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9622375	Electrostatic chuck with external flow adjustments for improved temperature distribution	Matthew J. Busche, Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Konstantin Makhratchev, Masanori Ono	2017-04-11	$31,319,000
9558981	Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods	Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono	2017-01-31	$44,860,000