Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods

Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods

US Patent 9558981 · Granted Jan 31, 2017

Estimated economic value: $44,860,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Increasing the gas efficiency for an electrostatic chuck2025
Extreme uniformity heated substrate support assembly2025
Semiconductor substrate support with internal channels2025
Substrate support with real time force and film stress control2025
Substrate support with real time force and film stress control2025
Modular substrate support assembly2025
Fabrication of substrate support devices using inorganic dielectric bonding2025
Electrostatic chuck assembly for cryogenic applications2025
Cryogenic micro-zone electrostatic chuck connector assembly2025
Cooled substrate support assembly for radio frequency environments2025
Tunable temperature controlled substrate support assembly2025
Tunable temperature controlled substrate support assembly2025