| 9845550 |
Upper dome with injection assembly |
Anzhong Chang, Edric Tong, Kin Pong Lo, James Francis Mack, Zhiyuan Ye +5 more |
2017-12-19 |
| 9842753 |
Absorbing lamphead face |
Joseph M. Ranish, Satheesh Kuppurao, Balasubramanian Ramachandran, Zuoming ZHU |
2017-12-12 |
| 9832816 |
Absorbing reflector for semiconductor processing chamber |
Kin Pong Lo, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield, Joseph M. Ranish +6 more |
2017-11-28 |
| 9814099 |
Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same |
Shu-Kwan LAU, Joseph M. Ranish, Mehmet Tugrul Samir |
2017-11-07 |
| 9768043 |
Quartz upper and lower domes |
Anzhong Chang, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir, David K. Carlson +9 more |
2017-09-19 |
| 9748121 |
Thermal coupled quartz dome heat sink |
Joseph M. Ranish, Mehmet Tugrul Samir |
2017-08-29 |
| 9711382 |
Dome cooling using compliant material |
Joseph M. Ranish |
2017-07-18 |
| 9580835 |
Multizone control of lamps in a conical lamphead using pyrometers |
Joseph M. Ranish, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more |
2017-02-28 |
| 9570275 |
Heated showerhead assembly |
James D. Carducci, Olga Regelman, Kallol Bera, Douglas A. Buchberger, Jr. |
2017-02-14 |
