Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842748 | Flow controlled liner having spatially distributed gas passages | Shu-Kwan LAU | 2017-12-12 |
| 9814099 | Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same | Shu-Kwan LAU, Joseph M. Ranish, Paul Brillhart | 2017-11-07 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, David K. Carlson +9 more | 2017-09-19 |
| 9748121 | Thermal coupled quartz dome heat sink | Joseph M. Ranish, Paul Brillhart | 2017-08-29 |
| 9695508 | Liner assembly for chemical vapor deposition chamber | David K. Carlson, Nyi O. Myo | 2017-07-04 |
| 9580835 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran +1 more | 2017-02-28 |
| 9553002 | Flow controlled liner having spatially distributed gas passages | Shu-Kwan LAU | 2017-01-24 |